Product
Electronic grade hydrofluoric acid
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molecular formula: HF-H2O
Physicochemical property: it is colorless transparent liquid with weak acidity and strong corrosion property
Quality index (Q/KAIHN01-2019):
| grade | UP-S | UP | EL | |
| ITEM | UNIT | index | index | index |
| contentASSAY | % | 49%±0.2 | 49%±0.2 | 49%±0.2 |
| fluosilicic acid(H2SiF6) | mg/L | ≤100 | ≤100 | ≤100 |
| oxide(CL) | mg/L | ≤5 | ≤5 | ≤5 |
| nitrate(NO3) | mg/L | ≤3 | ≤3 | ≤3 |
| phosphate (PO4) | mg/L | ≤1 | ≤1 | ≤1 |
| sulfate and sulfite | mg/L | ≤5 | ≤5 | ≤5 |
| COLOR | HAZEN | ≤10 | ≤10 | ≤10 |
| particle (≥1.0μm) | Ea/ml | ≤10 | ≤25 | ≤25 |
| As | PPB | ≤1 | ≤10 | ≤100 |
| Li | PPB | ≤1 | ≤10 | ≤100 |
| Na | PPB | ≤1 | ≤10 | ≤100 |
| Mg | PPB | ≤1 | ≤10 | ≤100 |
| Al | PPB | ≤1 | ≤10 | ≤100 |
| K | PPB | ≤1 | ≤10 | ≤100 |
| Ca | PPB | ≤1 | ≤10 | ≤100 |
| Cr | PPB | ≤1 | ≤10 | ≤100 |
| Fe | PPB | ≤1 | ≤10 | ≤100 |
| Co | PPB | ≤1 | ≤10 | ≤100 |
| Ni | PPB | ≤1 | ≤10 | ≤100 |
| Cu | PPB | ≤1 | ≤10 | ≤100 |
| Zn | PPB | ≤1 | ≤10 | ≤100 |
| Ga | PPB | ≤1 | ≤10 | ≤100 |
| Mo | PPB | ≤1 | ≤10 | ≤100 |
| Ag | PPB | ≤1 | ≤10 | ≤100 |
| Cd | PPB | ≤1 | ≤10 | ≤100 |
| Sn | PPB | ≤1 | ≤10 | ≤100 |
| Ba | PPB | ≤1 | ≤10 | ≤100 |
| Pt | PPB | ≤1 | ≤10 | ≤100 |
| Au | PPB | ≤1 | ≤10 | ≤100 |
| Mn | PPB | ≤1 | ≤10 | ≤100 |
| Pb | PPB | ≤1 | ≤10 | ≤100 |
| Ti | PPB | ≤1 | ≤10 | ≤100 |
| Be | PPB | ≤1 | ≤10 | ≤100 |
| B | PPB | ≤1 | ≤10 | ≤100 |
| V | PPB | ≤1 | ≤10 | ≤100 |
| Ge | PPB | ≤1 | ≤10 | ≤100 |
| Sr | PPB | ≤1 | ≤10 | ≤100 |
| Zr | PPB | ≤1 | ≤10 | ≤100 |
| Bi | PPB | ≤1 | ≤10 | ≤100 |
| Sb | PPB | ≤1 | ≤10 | ≤100 |
Uses: It is mainly used in integrated circuit industry for chip cleaning. It is essential chemical in micro electronic technique aspect. It is also used in TFT-LCD industry for etching of glass substrate, silicon nitride, silicon dioxide. And it is applied in solar cell industry for silicon surface cleaning.
Packing specification: 1000L IBC container; 200L drum, 20L drum, 5L GPB